Using combinatorial ion implantation, a magnetooptic materials chip composing Fe,Mn,Ga and Cu was fabricated in ion sputtered CoAg films.
对于离子束溅射沉积的CoAg薄膜,采用组合离子注入技术制备了由Fe、Mn、Ga、Cu4种元素所组成的磁光芯片。
